✦ LIBER ✦

Transient enhanced diffusion and electrical activation of As in Si during rapid thermal annealing

✍ Scribed by R. Kögler; E. Wieser; M. Voelskow; G. Otto

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

An explanation of transient-enhanced dif

✍ H.U. Jäger 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 278 KB

Anomalous Enhanced Diffusion and Electri

✍ Guimarães, S. ;Kögler, R. ;Landi, E. ;Solmi, S. ;Wieser, E. 📂 Article 📅 1986 🏛 John Wiley and Sons 🌐 English ⚖ 559 KB

Enhanced Diffusion of Impurities in Sili

✍ Aleksandrov, L. N. ;Bondareva, T. V. 📂 Article 📅 1991 🏛 John Wiley and Sons 🌐 English ⚖ 197 KB

Enhanced diffusion phenomena during rapi

✍ Guimarães, S. ;Landi, E. ;Solmi, S. 📂 Article 📅 1986 🏛 John Wiley and Sons 🌐 English ⚖ 645 KB

Activation and diffusion during rapid th

✍ J.J. Grob; S. Unamuno; A. Grob; M. Ajaka; A. Slaoui; R. Stuck 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 401 KB

Diffusion of boron and arsenic implants

✍ R. Kalish; G.S. Oehrlein; V.R. Deline; S.A. Cohen 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 563 KB