Laser ablation was used to realise piezoelectric films for use in a low-voltage cantilever bimorph actuator structure. Neodymiumdoped lead zirconium titanate (PZT) targets were ablated by a pulsed \(\mathrm{XeCl}\) excimer laser (wavelength \(308 \mathrm{~nm}\) ). The deposited films showed a better
✦ LIBER ✦
Transformation process of laser ablated PZT thin films
✍ Scribed by Hongxue Zhang; Hannu Moilanen; Antti Uusimäki; Seppo Leppävuori; Risto Rautioaho
- Book ID
- 112817900
- Publisher
- Springer US
- Year
- 1993
- Tongue
- English
- Weight
- 405 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0361-5235
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