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Transformation of interface states in silicon-on-insulator structures under annealing in hydrogen atmosphere

✍ Scribed by I. V. Antonova; I. Stano; D. V. Nikolaev; O. V. Naumova; V. P. Popov; V. A. Skuratov

Book ID: 110129072
Publisher: Springer
Year: 2002
Tongue: English
Weight: 75 KB
Volume: 36
Category: Article
ISSN: 1063-7826
DOI: 10.1134/1.1434515

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