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Transfer of thin Si layers by cold and thermal ion cutting

✍ Scribed by K. Henttinen; T. Suni; A. Nurmela; H. V. A. Luoto; I. Suni; V.-M. Airaksinen; S. Karirinne; M. Cai; S. S. Lau


Book ID
111537788
Publisher
Springer US
Year
2003
Tongue
English
Weight
798 KB
Volume
14
Category
Article
ISSN
0957-4522

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