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Growth of thin β-SiC layers by carbonization of Si surfaces by rapid thermal processing

✍ Scribed by V. Cimalla; K.V. Karagodina; J. Pezoldt; G. Eichhorn


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
611 KB
Volume
29
Category
Article
ISSN
0921-5107

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