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Towards nanometric resolution in multilayer depth profiling: a comparative study of RBS, SIMS, XPS and GDOES

✍ Scribed by Ramón Escobar Galindo; Raul Gago; David Duday; Carlos Palacio

Book ID: 105892884
Publisher: Springer
Year: 2010
Tongue: English
Weight: 872 KB
Volume: 396
Category: Article
ISSN: 1618-2650
DOI: 10.1007/s00216-009-3339-y

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