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Depth Profiling and Compositional Study of Implanted Surface Layers and Nitride Multilayers by a Combined GDOES, NRA and RBS Analysis

✍ Scribed by Cristina Fernández-Ramos; Javier García-López; Asunción Fernández; Rosario Martínez; Jose A. García; Rafael J. Rodríguez

Book ID: 118285812
Publisher: John Wiley and Sons
Year: 2007
Tongue: English
Weight: 325 KB
Volume: 4
Category: Article
ISSN: 1612-8850
DOI: 10.1002/ppap.200732004

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