✦ LIBER ✦

Topographic Correction of 3D SIMS Images

✍ Scribed by Wagter, M. L.; Clarke, A. H.; Taylor, K. F.; van der Heide, P. A. W.; McIntyre, N. S.

Publisher: John Wiley and Sons
Year: 1997
Tongue: English
Weight: 126 KB
Volume: 25
Category: Article
ISSN: 0142-2421
DOI: 10.1002/(sici)1096-9918(199709)25:10<788::aid-sia300>3.0.co;2-w

No coin nor oath required. For personal study only.

✦ Synopsis

In order to provide an accurate rendition of a three-dimensional (3D) volume obtained by SIMS, it is necessary to take account of the topography of the original surface and the relative sputter rates of the di †erent structures within the volume. We describe a method that corrects both distortions to 3D SIMS images. An atomic force microscope is used to produce a topographic images of the area analysed by SIMS, both before and after the depth proÐle. This information is convoluted with the 3D SIMS image to produce a correct 3D image of the changes in composition within the volume of the material.

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