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3D molecular imaging SIMS

✍ Scribed by Greg Gillen; Albert Fahey; Matt Wagner; Christine Mahoney


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
710 KB
Volume
252
Category
Article
ISSN
0169-4332

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In order to provide an accurate rendition of a three-dimensional (3D) volume obtained by SIMS, it is necessary to take account of the topography of the original surface and the relative sputter rates of the di †erent structures within the volume. We describe a method that corrects both distortions t

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