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Titanium nitride films prepared by ion implantation

✍ Scribed by P.A. Chen; T.T. Yang

Publisher: Elsevier Science
Year: 1981
Tongue: English
Weight: 88 KB
Volume: 81
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(81)90511-3

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