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Titanium-doped indium oxide films prepared by d.c. magnetron sputtering using ceramic target

โœ Scribed by Yoshiyuki Abe; Noriko Ishiyama

Book ID
106392065
Publisher
Springer
Year
2006
Tongue
English
Weight
165 KB
Volume
41
Category
Article
ISSN
0022-2461

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โœ Zhang, Keran; Zhu, Furong; Huan, C. H. A.; Wee, A. T. S.; Osipowicz, T. ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 133 KB ๐Ÿ‘ 2 views

## Indium -doped zinc oxide (ZnO : In) films were prepared by simultaneous r.f. and d.c. magnetron sputtering. The structural, optical and electrical properties of the films have been obtained by x-ray diffractometry (XRD), Rutherford backscattering spectrometry (RBS), spectrophotometry and atomic