Indium-doped zinc oxide films prepared b
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Zhang, Keran; Zhu, Furong; Huan, C. H. A.; Wee, A. T. S.; Osipowicz, T.
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Article
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1999
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John Wiley and Sons
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English
β 133 KB
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## Indium -doped zinc oxide (ZnO : In) films were prepared by simultaneous r.f. and d.c. magnetron sputtering. The structural, optical and electrical properties of the films have been obtained by x-ray diffractometry (XRD), Rutherford backscattering spectrometry (RBS), spectrophotometry and atomic