TiO2 anatase films obtained by direct liquid injection atomic layer deposition at low temperature

✍ Scribed by Avril, L.; Reymond-Laruinaz, S.; Decams, J.M.; Bruyère, S.; Potin, V.; de Lucas, M.C. Marco; Imhoff, L.

• Book ID: 121321293
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 697 KB
• Volume: 288
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2013.10.007