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TiN[sub x]/HfO[sub 2] interface dipole induced by oxygen scavenging

✍ Scribed by Afanas’ev, V. V.; Stesmans, A.; Pantisano, L.; Cimino, S.; Adelmann, C.; Goux, L.; Chen, Y. Y.; Kittl, J. A.; Wouters, D.; Jurczak, M.

Book ID: 121812201
Publisher: American Institute of Physics
Year: 2011
Tongue: English
Weight: 350 KB
Volume: 98
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.3570647

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