✦ LIBER ✦
Towards barrier height modulation in HfO2/TiN by oxygen scavenging – Dielectric defects or metal induced gap states?
✍ Scribed by Luigi Pantisano; V.V. Afanas’ev; S. Cimino; C. Adelmann; L. Goux; Y.Y. Chen; J.A. Kittl; D. Wouters; M. Jurczak
- Book ID
- 104052983
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 601 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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