Tin oxide micro gas sensor for detecting CH3SH

✍ Scribed by Hyeon Soo Park; Hyun Woo Shin; Dong Hyun Yun; Hyung-Ki Hong; Chul Han Kwon; Kyuchung Lee; Sung-Tae Kim

• Book ID: 103961258
• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 468 KB
• Volume: 25
• Category: Article
• ISSN: 0925-4005
• DOI: 10.1016/0925-4005(95)85102-x

✦ Synopsis

Highly sensitive and mechanically stable micro gas sensors have been made using microfabrication and micromachining techniques. The sensing material used to detect offensive CHsSH gas is 1 wt.% Pd-doped, 2000 A thick SnOz deposited by r.f. magnetron sputtering. The optimum operating temperature of the sensor is 2.50 "C, and the corresponding heater power is about 55 mW. Excellent thermal insulation of the membrane is achieved by the use of a double-layer structure of 0.2 w thick silicon nitride and 1.4 pm thick phosphosilicate glass (PSG) prepared by low-pressure chemical-vapour deposition (LPCVD) and atmospheric-pressure chemical-vapour deposition (APCVD), respectively. The sensors are mechanically stable enough to endure at least 43 200 heat cycles between room temperature and 350 "C.