Highly sensitive and mechanically stable micro gas sensors have been made using microfabrication and micromachining techniques. The sensing material used to detect offensive CHsSH gas is 1 wt.% Pd-doped, 2000 A thick SnOz deposited by r.f. magnetron sputtering. The optimum operating temperature of t
Fabrication and characterization of micro-gas sensor for nitrogen oxides gas detection
โ Scribed by Dae-Sik Lee; Jun-Woo Lim; Sang-Mun Lee; Jeung-Soo Huh; Duk-Dong Lee
- Book ID
- 108471155
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 636 KB
- Volume
- 64
- Category
- Article
- ISSN
- 0925-4005
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