✦ LIBER ✦
Patterning of thin tin oxide film with nano-size particle for two-dimensional micro-gas sensor array
✍ Scribed by Wan-Young Chung; Jun-Woo Lim
- Book ID
- 104443796
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 315 KB
- Volume
- 3
- Category
- Article
- ISSN
- 1567-1739
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✦ Synopsis
Thin tin oxide film with nano-size particle was prepared on silicon substrate by hydrothermal synthetic method and successive sol-gel spin coating method. The fabrication method of tin oxide film with ultrafine nano-size crystalline structure was tried to be applied to fabrication of micro-gas sensor array on silicon substrate. The tin oxide film on silicon substrate was well patterned by chemical etching upto 5 lm width and showed very uniform flatness. The tin oxide film preparation method and patterning method were successfully applied to newly proposed two-dimensional micro-sensor fabrication.