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TiN film formation by plasma chemical vapor deposition and its plasma diagnostics

โœ Scribed by Y. Ishii; H. Ohtsu; T. Adachi; H. Ichimura; K. Kobayashi


Book ID
103631490
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
474 KB
Volume
49
Category
Article
ISSN
0257-8972

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