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Three dimensional modeling of LPCVD vertical cold wall reactors

✍ Scribed by S. Ait Amer; J.P. Couderc; P. Duverneuil

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 300 KB
Volume: 18
Category: Article
ISSN: 0098-1354
DOI: 10.1016/0098-1354(94)80039-1

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