✦ LIBER ✦
Numerical study of gasdynamics influence on three-dimensional transport phenomena in vertical zinc selenide LPCVD reactor
✍ Scribed by E.A. Garibin; I.A. Mironov; S.E. Khoruzhnikov; A.N. Vorob'ev
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 693 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0921-5107
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