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Three-dimensional micromachining of silicon using a nuclear microprobe

✍ Scribed by E.J Teo; E.P Tavernier; M.B.H Breese; A.A Bettiol; F Watt; M.H Liu; D.J Blackwood

Book ID: 113823297
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 433 KB
Volume: 222
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2004.04.159

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