Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture

✍ Scribed by K. Sugioka; Y. Cheng; K. Midorikawa

• Publisher: Springer
• Year: 2005
• Tongue: English
• Weight: 808 KB
• Volume: 81
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-005-3225-1