Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for Lab-on-a-chip applications

✍ Scribed by Ya Cheng; Koji Sugioka; Katsumi Midorikawa

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 205 KB
• Volume: 248
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2005.03.078