3D integration of microcomponents in a single glass chip by femtosecond laser direct writing for biochemical analysis

✍ Scribed by Koji Sugioka; Yasutaka Hanada; Katsumi Midorikawa

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 481 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2007.01.072