Maskless fabrication of 3-dimensional microstructures in PMMA using a nuclear microprobe

✍ Scribed by D.G. de Kerckhove; M.B.H. Breese; M.A. Marsh; G.W. Grime

• Book ID: 114169804
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 494 KB
• Volume: 136-138
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(97)00876-8