Three-dimensional micromachining of silicon pressure sensor integrating resonant strain gauge on diaphragm

✍ Scribed by Kyoichi Ikeda; Hideki Kuwayama; Takashi Kobayashi; Teysuya Watanabe; Tadashi Nishikawa; Takashi Yoshida; Kinji Harada

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 411 KB
• Volume: 23
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(90)87078-w