Three-dimensional integrated coil inductor on silicon for high-frequency applications

✍ Scribed by K. S. Yeo; H. P. Tan; J. G. Ma; M. A. Do

• Book ID: 102519724
• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: English
• Weight: 187 KB
• Volume: 31
• Category: Article
• ISSN: 0895-2477
• DOI: 10.1002/mop.1346

✦ Synopsis

Abstract

This letter presents the results of a new 3‐D high‐performance coil inductor, which was fabricated using standard 0.25 μm CMOS technology. Comparative evaluation with the conventional spiral inductor was performed in terms of quality factor (Q), inductance (L), and chip area. © 2001 John Wiley & Sons, Inc. Microwave Opt Technol Lett 31: 23–24, 2001.