Three-Dimensional Solenoids Realized via High-Density Deep Coil Stacking for MEMS Application

✍ Scribed by Li, H.Y.; Xie, L.; Ong, L.G.; Baram, A.; Herer, I.; Hirshberg, A.; Chong, S.C.; Gao, S.; Kwong, D.L.

• Book ID: 114572647
• Publisher: IEEE
• Year: 2012
• Tongue: English
• Weight: 351 KB
• Volume: 33
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/led.2011.2182601