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Thin films for gas sensors

✍ Scribed by R. Lalauze; P. Breuil; C. Pijolat


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
691 KB
Volume
3
Category
Article
ISSN
0925-4005

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Device-quahty ZnO thm film IS deposlted by usmg an mdlgenously developed moddied CVD method and a Pd/ZnO/p-B heteropmctlon IS fabricated A study of the current-voltage characterlstlcs of the heterolunctlon m pure air and m air with different concentrations (2000-20 000 ppm) of hydrogen reveals that