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Aerosol-Assisted CVD of SnO2 Thin Films for Gas-Sensor Applications

✍ Scribed by Toni T. Stoycheva; Stella Vallejos; Roman G. Pavelko; Viktor S. Popov; Vladimir G. Sevastyanov; Xavier Correig

Publisher
John Wiley and Sons
Year
2011
Tongue
English
Weight
452 KB
Volume
17
Category
Article
ISSN
0948-1907

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## Abstract Titanium dioxide (TiO~2~) thin films are synthesized using aerosol‐assisted (AA)CVD of titanium (IV) isopropoxide (TTIP) in methanol. Deposition is carried out on glass, steel, and titanium substrates at 400–550Β°C. The films produce morphologies that are radically different to those fro