✦ LIBER ✦

Thin-Film Piezoelectric Materials For a Better Energy Harvesting MEMS

✍ Scribed by Wasa, K.; Matsushima, T.; Adachi, H.; Kanno, I.; Kotera, H.

Book ID: 114563660
Publisher: IEEE
Year: 2012
Tongue: English
Weight: 596 KB
Volume: 21
Category: Article
ISSN: 1057-7157
DOI: 10.1109/jmems.2011.2181156

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