A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations

✍ Scribed by Huicong Liu; Chenggen Quan; Cho Jui Tay; Takeshi Kobayashi; Chengkuo Lee

• Book ID: 113846585
• Publisher: Elsevier
• Year: 2011
• Tongue: English
• Weight: 352 KB
• Volume: 19
• Category: Article
• ISSN: 1875-3892
• DOI: 10.1016/j.phpro.2011.06.136