Sputtered thin film piezoelectric aluminium nitride as a functional MEMS material and CMOS compatible process integration

✍ Scribed by S. Marauska; T. Dankwort; H.J. Quenzer; B. Wagner

• Book ID: 119355799
• Publisher: Elsevier
• Year: 2011
• Tongue: English
• Weight: 475 KB
• Volume: 25
• Category: Article
• ISSN: 1877-7058
• DOI: 10.1016/j.proeng.2011.12.331