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Thickness variation effects on X-ray scattering of multilayers

✍ Scribed by Ahmed Boufelfel; Charles M. Falco


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
831 KB
Volume
258
Category
Article
ISSN
0040-6090

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We discuss the theory of X-ray scattering from multilayers with conformal roughness of the interfaces, and illustrate with an analysis of specular, diffuse and wide-angle scattering from a GaAs/AIAs multilayer. This is a highly coherent multilayer structure deposited on a stepped, but otherwise smoo