X-ray scattering studies of surface roughness of GaAs/A1As multilayers

✍ Scribed by S.K. Sinha; M.K. Sanyal; S.K. Satija; C.F. Majkrzak; D.A. Neumann; H. Homma; S. Szpala; A. Gibaud; H. Morkoc

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 368 KB
• Volume: 198
• Category: Article
• ISSN: 0921-4526
• DOI: 10.1016/0921-4526(94)90131-7

✦ Synopsis

We discuss the theory of X-ray scattering from multilayers with conformal roughness of the interfaces, and illustrate with an analysis of specular, diffuse and wide-angle scattering from a GaAs/AIAs multilayer. This is a highly coherent multilayer structure deposited on a stepped, but otherwise smooth surface. The roughness due to the steps propagates through the layers and a distinct anisotropy is observed in the diffuse scattering. We discuss a method to treat diffuse scattering from such surfaces with slightly irregular steps.