✦ LIBER ✦

Influence of thin film thickness variations on pattern fidelity of X-ray masks

✍ Scribed by W.H. Brünger; H. Betz; A. Heuberger; J. Hersener

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Thickness variation effects on X-ray sca

✍ Ahmed Boufelfel; Charles M. Falco 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 831 KB

Pulse plating of quarter micron gold pat

✍ B. Löchel; A. Macioßek; J. Trube; H.-L. Huber 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 369 KB

Influence of thickness on field emission

✍ Y.X. Wang; Y.A. Li; W. Feng; W.Q. Li; C.H. Zhao; L.H. Liu; K.C. Feng; Y.N. Zhao 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 377 KB

Influence of phase shift on pattern tran

✍ M. Weiss; H. Oertel; H.-L. Huber 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 343 KB

Influence of high-energy X-ray irradiati

✍ M.M. El-Nahass; H.M. Zeyada; M.S. Aziz; M.M. Makhlouf 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 567 KB

Influence of the thin-film thickness and

✍ Jieping Liu; Xiaoping Qiao; Shuangai He; Qikun Cao; Hui Wang 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 366 KB 👁 2 views