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Thickness dependence of the properties of plasma-deposited a-Si:H films — NMR studies

✍ Scribed by J.B. Boyce; M.J. Thompson

Book ID
118332661
Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
294 KB
Volume
66
Category
Article
ISSN
0022-3093

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Influence of thickness on the optical properties of vacuum-deposited a-Si:H films
✍ A.M. El-Naggar 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 110 KB

The in uence of the thickness of the a-Si : H ÿlm on its optical properties was studied using spectrophotometric measurements of the ÿlm transmittance and re ectance in the wavelength range 200 -3000 nm. Both the refractive index and the absorption coe cient were found to increase as the ÿlm thickne