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Thickness dependence of stress-induced leakage currents in silicon oxide

✍ Scribed by Runnion, E.F.; Gladstone, S.M.; Scott, R.S., Jr.; Dumin, D.J.; Lie, L.; Mitros, J.C.

Book ID: 114536861
Publisher: IEEE
Year: 1997
Tongue: English
Weight: 150 KB
Volume: 44
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.585556

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