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Thickness dependence of morphology and mechanical properties of on-wafer low-k PTFE dielectric films

✍ Scribed by Jinguo Wang; H.K Kim; Frank G. Shi; Bin Zhao; T.G. Nieh


Book ID
114085331
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
567 KB
Volume
377-378
Category
Article
ISSN
0040-6090

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