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Electrical property dependence on thickness and morphology of nanocrystalline diamond thin films

✍ Scribed by T. Ižák; M. Vojs; M. Veselý; J. Škriniarová; I. Novotný; M. Michalka; R. Redhammer

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
475 KB
Volume
40
Category
Article
ISSN
0026-2692

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## Abstract The structural, optical, and electronic properties of nanocrystalline diamond thin films grown from a hydrogen‐rich CH~4~/H~2~ gas phase via hot filament (HF) CVD and of ultrananocrystalline diamond thin films grown from an argon‐rich sp^2^ gas phase via microwave plasma enhanced (MPE)