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Thickness and refractive index measurement of a silicon wafer based on an optical comb

✍ Scribed by Jin, Jonghan; Kim, Jae Wan; Kang, Chu-Shik; Kim, Jong-Ahn; Eom, Tae Bong

Book ID: 115413532
Publisher: Optical Society of America
Year: 2010
Tongue: English
Weight: 875 KB
Volume: 18
Category: Article
ISSN: 1094-4087
DOI: 10.1364/OE.18.018339

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