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Spectroellipsometric measurement of refractive index and thickness for HfO2films on optical glass

✍ Scribed by V. A. Odarich; V. I. Panasyuk; V. S. Stashchuk

Publisher: Springer US
Year: 1992
Tongue: English
Weight: 214 KB
Volume: 56
Category: Article
ISSN: 0021-9037
DOI: 10.1007/bf00661757

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