𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Thick macroporous membranes made of p-type silicon

✍ Scribed by Zheng, J. ;Christophersen, M. ;Bergstrom, P. L.

Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
139 KB
Volume
202
Category
Article
ISSN
0031-8965

No coin nor oath required. For personal study only.

✦ Synopsis

Abstract

In the last decade, very thick macro porous silicon (PS) has been enjoying a growing popularity in a wide range of applications. There is also an increasing demand for thick macroporous membranes with through pores. In this work, we studied the optimal etch conditions with respect to stable pore growth and high etch rate for macro PS in p‐type silicon. A single‐step etching process has been developed to tackle the problem of uniform membrane formation. Very thick (>500 µm) through‐wafer macroporous membranes on p‐type silicon with variable pore sizes and growth rates up to 0.95 µm/min have been successfully demonstrated. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

📜 SIMILAR VOLUMES

Investigation of p-type macroporous sili
Investigation of p-type macroporous silicon formation
✍ Lévy-Clément, C. ;Lust, S. ;Mamor, M. ;Rappich, J. ;Dittrich, Th. 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 169 KB

## Abstract Nanopores and macropores can be formed electrochemically on p‐type silicon depending on the silicon resistivity and composition of the electrolyte. In order to understand if the structural dimensionality of the porous p‐type Si, either nanopore or macropore formation, depends on the ele

Membranes for Micropumps from Macroporou
Membranes for Micropumps from Macroporous Silicon
✍ M�ller, F. ;Birner, A. ;Schilling, J. ;G�sele, U. ;Kettner, Ch. ;H�nggi, P. 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 151 KB 👁 1 views

È ller 1 ) (a), A. Birner (a), J. Schilling (a), U. Go È sele (a), Ch. Kettner (b), and P. Ha È nggi (b) (a) Max-

Macropore growth in a prepatterned p-typ
Macropore growth in a prepatterned p-type silicon wafer
✍ Kobayashi, K. ;Harraz, F. A. ;Izuo, S. ;Sakka, T. ;Ogata, Y. H. 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 421 KB

## Abstract The formation process of ordered macropores in a prepatterned p‐type silicon wafer was investigated. FE‐SEM observation focusing on the early stage of the pore growth clarified the two‐step process of macropore formation, whose first step was isotropic pore expansion from prepared etch