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Membranes for Micropumps from Macroporous Silicon

✍ Scribed by M�ller, F. ;Birner, A. ;Schilling, J. ;G�sele, U. ;Kettner, Ch. ;H�nggi, P.


Publisher
John Wiley and Sons
Year
2000
Tongue
English
Weight
151 KB
Volume
182
Category
Article
ISSN
0031-8965

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✦ Synopsis


È ller 1 ) (a), A. Birner (a), J. Schilling (a), U. Go È sele (a), Ch. Kettner (b), and P. Ha È nggi (b) (a) Max-


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