✦ LIBER ✦

Oxidation of macroporous silicon for thick thermal insulation

✍ Scribed by P.Y.Y. Kan; T.G. Finstad

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 229 KB
Volume: 118
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2004.12.044

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Thickness measurement on insulating sili

Thickness measurement on insulating silicon oxide layers on silicon structures with dielectric insulation

✍ S. I. Stolyarov; V. M. Trokhin; N. M. Vinnikov; N. D. Vdovichenko; A. D. Usenko 📂 Article 📅 1983 🏛 Springer US 🌐 English ⚖ 321 KB

Thick macroporous membranes made of p-ty

Thick macroporous membranes made of p-type silicon

✍ Zheng, J. ;Christophersen, M. ;Bergstrom, P. L. 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 139 KB

## Abstract In the last decade, very thick macro porous silicon (PS) has been enjoying a growing popularity in a wide range of applications. There is also an increasing demand for thick macroporous membranes with through pores. In this work, we studied the optimal etch conditions with respect to st

Determination of silicon oxide thickness

✍ N. Goldsmith; L.A. Murray 📂 Article 📅 1966 🏛 Elsevier Science 🌐 English ⚖ 166 KB

Generation and characterization of thick

Generation and characterization of thick silicon-on-insulator films

✍ Tillack, B. ;Banisch, R. ;Richter, H. H. 📂 Article 📅 1988 🏛 John Wiley and Sons 🌐 English ⚖ 689 KB

Double-Sided Mesoporous Silicon Formatio

Double-Sided Mesoporous Silicon Formation for Thermal Insulating Applications

✍ V. Lysenko; B. Remaki; D. Barbier 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 564 KB

Another method for the determination of

Another method for the determination of silicon oxide thickness

✍ F. Lukěs; E. Schmidt 📂 Article 📅 1967 🏛 Elsevier Science 🌐 English ⚖ 193 KB