## Abstract Highβrate cathode growth of nanorods is observed for dc magnetron sputtering of graphite, germanium and molybdenum cathodes despite the sputtering. The growth of vertically aligned carbon nanorods using dc magnetron sputtering with deuterium as the working gas and a polycrystalline nucl
Thick beryllium coatings by ion-assisted magnetron sputtering
β Scribed by Xu, Hongwei; Alford, Craig; Chason, Eric; Detor, Andrew J.; Fuller, Tim; Hamza, Alex V.; Hayes, Jeff; Moreno, Kari A.; Nikroo, Abbas; van Buuren, Tony; Wang, Yinmin; Wu, Jun-jim; Wilkens, Heather; Youngblood, Kelly P.
- Book ID
- 121440777
- Publisher
- Cambridge University Press
- Year
- 2011
- Tongue
- English
- Weight
- 246 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0884-2914
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CrB 2 coatings were synthesized on high speed steel (HSS) substrates using inductively coupled plasma (ICP) assisted DC magnetron sputtering, and the structure and properties of the CrB 2 coating produced at different ICP powers and substrate biases were investigated. The hardness of the CrB 2 coati
In conventional balanced-magnetron (CBM) sputtering, the amount of ion bombardment of the growing film, as measured by the substrate bias current density, is limited to less than 1 mA cm -z. Fast secondary electrons escaping from the target surface quickly find a path to ground and undergo few ioniz