Thermodynamic analyses of halide vapor phase epitaxy (HVPE) for the growth of ZnO were conducted to investigate the effects of growth conditions against growth rates. The partial pressures of gaseous species in equilibrium with ZnO and the resultant driving force for ZnO deposition are calculated wi
✦ LIBER ✦
Thermodynamic study of β-Ga2O3 growth by halide vapor phase epitaxy
✍ Scribed by Nomura, Kazushiro; Goto, Ken; Togashi, Rie; Murakami, Hisashi; Kumagai, Yoshinao; Kuramata, Akito; Yamakoshi, Shigenobu; Koukitu, Akinori
- Book ID
- 125858472
- Publisher
- Elsevier Science
- Year
- 2014
- Tongue
- English
- Weight
- 756 KB
- Volume
- 405
- Category
- Article
- ISSN
- 0022-0248
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