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Growth of InN at High Temperature by Halide Vapor Phase Epitaxy

โœ Scribed by Takahashi, Naoyuki; Matsumoto, Ryu; Koukitu, Akinori; Seki, Hisashi


Book ID
121481818
Publisher
Institute of Pure and Applied Physics
Year
1997
Tongue
English
Weight
868 KB
Volume
36
Category
Article
ISSN
0021-4922

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Thermodynamic analyses of halide vapor phase epitaxy (HVPE) for the growth of ZnO were conducted to investigate the effects of growth conditions against growth rates. The partial pressures of gaseous species in equilibrium with ZnO and the resultant driving force for ZnO deposition are calculated wi