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Growth of InN by Chloride-Transport Vapor Phase Epitaxy

โœ Scribed by Sunakawa, Haruo; Yamaguchi, A. Atsushi; Kimura, Akitaka; Usui, Akira


Book ID
121481815
Publisher
Institute of Pure and Applied Physics
Year
1996
Tongue
English
Weight
711 KB
Volume
35
Category
Article
ISSN
0021-4922

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Platinum-catalyst-assisted metalorganic
โœ Kohei Sasamoto; Ken-ichi Sugita; Akihiro Hashimoto; Akio Yamamoto ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 329 KB

This paper reports the first attempt of the Pt-catalyst-assisted MOVPE growth of InN. In order to enhance NH 3 decomposition at a relatively low growth temperature ($ 550 1C), Pt is used as a catalyst. The catalyst is installed in the NH 3 introduction tube in the MOVPE reactor and the tube is locat